Institute of Physics Publishing Journal of Micromechanics and Microengineering Design and Fabrication of Artificial Lateral Line Flow Sensors 1. Underwater Flow Sensing

Underwater flow sensing is important for many robotics and military applications, including underwater robots and vessels. We report the development of micromachined, distributed flow sensors based on a biological inspiration, the fish lateral line sensors. Design and fabrication processes for realizing individual lateral line sensor nodes are discussed in this paper, along with preliminary characterization results.

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