A multimodal method for defect characterization of large-aperture optics

It is very challenging to characterize surface/sub-surface defects for large-aperture optics. The first challenge is the conflict between high resolution and large field of view, namely how to reach a good balance between high resolution and high efficiency for detecting various defects with sub-micronover the meter-size surface of optics. The second challenge is how to classify defects accurately, which is very important for determining origin of defects and improving optics quality.In this paper, a multimodal inspection technique for surface/sub-surface defects of large-aperture optics is reported, in which a high speed laser scattering imaging with a sensitivity at 200-nm scale is used for defect discovery of large-aperture optics. The defect discovery provides a statistical result of defects of the optics. After that, a multifunctional microscopic method is used for local defect review. A photo thermal scanning microscopy is used for specific characterization of absorption defects, and a confocal microscopy is used for characterization of sub-surface defects. The defect review provides information for defect classification. Based on this multimodal technique, an inspection system is also developed and used for defect characterization of large optics.

[1]  Mireille Commandré,et al.  Measurements of absorption losses in TiO(2) films by a collinear photothermal deflection technique. , 1990, Applied optics.

[2]  J. Néauport,et al.  Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm. , 2005, Optics express.

[3]  F. Génin,et al.  Role of light intensification by cracks in optical breakdown on surfaces. , 2001, Journal of the Optical Society of America. A, Optics, image science, and vision.

[4]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[5]  S. C. Jones,et al.  Recent Progress On Laser-Induced Modifications And Intrinsic Bulk Damage Of Wide-Gap Optical Materials , 1989 .

[6]  Joseph A. Menapace,et al.  The distribution of subsurface damage in fused silica , 2005, SPIE Laser Damage.

[7]  P. Alam.  ‘K’ , 2021, Composites Engineering.

[8]  Zhouling Wu,et al.  Three-dimensional photothermal microscopy of KDP crystals , 2014, Optics & Photonics - Optical Engineering + Applications.

[9]  L. Névot,et al.  Sur l'étude des couches superficielles monoatomiques par réflexion `rasante' (spéculaire ou diffuse) de rayons X, par la méthode de l'empilement `sandwich' , 1975 .

[10]  Jianda Shao,et al.  Combining wet etching and real-time damage event imaging to reveal the most dangerous laser damage initiator in fused silica. , 2013, Optics letters.

[11]  W. Marsden.  I and J , 2012 .

[12]  Qiang Zhao,et al.  Pulsed photothermal deflection and diffraction effects: numerical modeling based on Fresnel diffraction theory , 1999 .

[13]  P Cormont,et al.  Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy. , 2009, Optics express.

[14]  Mark Meeder,et al.  iTIRM as a tool for qualifying polishing processes. , 2002, Applied optics.

[15]  Stavros G Demos,et al.  Application of fluorescence microscopy for noninvasive detection of surface contamination and precursors to laser-induced damage. , 2002, Applied optics.

[16]  J. D. Bude,et al.  Laser-supported solid-state absorption fronts in silica , 2010 .

[17]  Angela Duparre,et al.  Surface roughness and subsurface damage characterization of fused silica substrates , 1999, Optical Systems Design.

[18]  Jian Wang,et al.  A method for evaluating subsurface damage in optical glass. , 2010, Optics express.

[19]  P. Miller,et al.  Fracture-induced subbandgap absorption as a precursor to optical damage on fused silica surfaces. , 2010, Optics letters.

[20]  Jérôme Néauport,et al.  Concerning the impact of polishing induced contamination of fused silica optics on the laser-induced damage density at 351 nm , 2008 .

[21]  Leonid B. Glebov.  Intrinsic laser-induced breakdown of silicate glasses , 2002, SPIE Laser Damage.

[22]  Eckart Matthias,et al.  Defect characterization for thin films through thermal wave detection , 1992, Laser Damage.

[23]  Tsuyoshi Murata,et al.  {m , 1934, ACML.

[24]  B. Do,et al.  Bulk and surface laser damage of silica by picosecond and nanosecond pulses at 1064 nm. , 2008, Applied optics.

[25]  L. L. Wong,et al.  HF‐Based Etching Processes for Improving Laser Damage Resistance of Fused Silica Optical Surfaces , 2011 .

[26]  Tayyab I. Suratwala,et al.  Metallic-like photoluminescence and absorption in fused silica surface flaws , 2009 .

[27]  Christopher W Carr,et al.  Model laser damage precursors for high quality optical materials. , 2014, Optics express.

[28]  Mark R. Kozlowski,et al.  Depth profiling of polishing-induced contamination on fused silica surfaces , 1998, Laser Damage.

[29]  Thomas de Quincey.  [C] , 2000, The Works of Thomas De Quincey, Vol. 1: Writings, 1799–1820.

[30]  Zhi M Liao,et al.  Predicting laser-induced bulk damage and conditioning for deuterated potassium dihydrogen phosphate crystals using an absorption distribution model. , 2010, Optics letters.