论文信息 - Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure - 字舞流文

Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure

Stephan A. Cohen | P. Rice | S. Purushothaman | N. Fuller | L. Krupp | H. Nakagawa | M. Lofaro | M. Darnon | W. Volksen | T. Magbitang | Y. Nobe | T. Kokubo | G. Dubois | J. Doyle