论文信息 - Porous silicon-a new material for MEMS

Porous silicon-a new material for MEMS

A technique for the formation of pore arrays with high aspect ratios by electrochemical etching of n-type silicon wafers in hydrofluoric acid is presented. New devices such as a silicon based capacitor or photonic bandgap materials for the infrared regime are fabricated based on this new technology.

Volker Lehmann | V. Lehmann

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