Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma.

The induced radio frequency magnetic fields of a low-frequency inductively coupled plasma are measured and modeled. The fields penetrate deep into the discharge, in contrast with existing predictions of field decay within a thin skin layer. Fluid calculations show that the enhanced penetration is due to a reduction of the plasma conductivity by the induced magnetic fields. {copyright} {ital 1996 The American Physical Society.}