论文信息 - INTERFERENCE EFFECTS IN X-RAY DOUBLE-CRYSTAL ROCKING CURVES OF GEXSI1-X/SI SUPERLATTICES

INTERFERENCE EFFECTS IN X-RAY DOUBLE-CRYSTAL ROCKING CURVES OF GEXSI1-X/SI SUPERLATTICES

Interference effects in the x‐ray double‐crystal rocking curves of GexSi1−x/Si strained‐layer superlattices have been simulated based on the x‐ray dynamical scattering theory. We found that the A1BA2 type of structure due to unstable growth conditions causes a series of strong oscillation fringes beside the superlattice reflection satellite peaks. The positions and intensities of these oscillation fringes with respect to the superlattice satellite peaks are strongly correlated to the number of periods in the subsuperlattice layer B and the relative mean lattice mismatch between A and B with respect to the substrate.

Z. Mai | J. Li | S. Cui

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