论文信息 - Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films. - 字舞流文

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films.

M. Knez | I. Abdulagatov | E. Modin | K. Ashurbekova | A. Abdulagatov | I. Šarić | M. Petravić | Kristina Ashurbekova | Kristina Ashurbekova | Karina Ashurbekova