Characteristic analysis of an ultrasonic micromotor using a 3 mm diameter piezoelectric rod

Smart systems and devices generally use certain microstructures, e.g.?rod-?and strip-shaped structures. In this paper, a miniaturized piezoelectric rod is analysed using the finite element method (FEM) and a laser scanning vibrometer (LSV). The effects of some factors, including the detailed structure, material parameters and input voltage, on the resonant frequencies and vibration behaviors of a piezoelectric rod are studied. On the basis of experimental results, the vibration modes of the piezoelectric rod can be made available for use in fabricating an ultrasonic micromotor or piezoelectric actuators of other types. The prototype motor fabricated here has a maximum output torque of 410??N?m for a stainless steel stator and 360??N?m for a copper stator.