Projecting deep-subwavelength patterns from diffraction-limited masks using metal-dielectric multilayers

We utilize a metal-dielectric multilayer structure to generate deep-subwavelength one-dimensional and two-dimensional periodic patterns with diffraction-limited masks. The working wavelength and the pattern are set by the flexible design of the multilayer structure. This scheme is suitable to be applied to deep-subwavelength photolithography. As an example, we numerically demonstrate pattern periods down to 50nm under 405nm light illumination.

[1]  E. Economou.  Surface Plasmons in Thin Films , 1969 .

[2]  R. W. Christy,et al.  Optical Constants of the Noble Metals , 1972 .

[3]  P. Colinvaux,et al.  A Long Pollen Record from Lowland Amazonia: Forest and Cooling in Glacial Times , 1996, Science.

[4]  E. Palik,et al.  Optical Parameters for the Materials in HOC I and HOC II , 1997 .

[5]  M. Madou.  Fundamentals of microfabrication , 1997 .

[6]  E. Palik.  Handbook of Optical Constants of Solids , 1997 .

[7]  Michael Scalora,et al.  Transparent, metallo-dielectric, one-dimensional, photonic band-gap structures , 1998 .

[8]  R. H. Stulen,et al.  Extreme ultraviolet lithography , 1998 .

[9]  Alfred A. Mondelli,et al.  A review of ion projection lithography , 1998 .

[10]  Jerome P. Silverman,et al.  Challenges and progress in x-ray lithography , 1998 .

[11]  R. Blaikie,et al.  Sub-diffraction-limited patterning using evanescent near-field optical lithography , 1999 .

[12]  Xu,et al.  "Dip-Pen" nanolithography , 1999, Science.

[13]  Christophe Vieu,et al.  Electron beam lithography: resolution limits and applications , 2000 .

[14]  Roderick R. Kunz,et al.  Review of technology for 157-nm lithography , 2001, IBM J. Res. Dev..

[15]  R. Shelby,et al.  Experimental Verification of a Negative Index of Refraction , 2001, Science.

[16]  R. Blaikie,et al.  Evanescent interferometric lithography. , 2001, Applied optics.

[17]  J. Goodberlet,et al.  Patterning Sub-50 nm features with near-field embedded-amplitude masks , 2002 .

[18]  W. Barnes,et al.  Surface plasmon subwavelength optics , 2003, Nature.

[19]  Robert W Boyd,et al.  Enhanced nonlinear optical response of one-dimensional metal-dielectric photonic crystals. , 2004, Physical review letters.

[20]  Chad A. Mirkin,et al.  Zur Entwicklung der Dip‐Pen‐Nanolithographie , 2004 .

[21]  Richard J. Blaikie,et al.  Near-field optical lithography using a planar silver lens , 2004 .

[22]  Xiangang Luo,et al.  Subwavelength photolithography based on surface-plasmon polariton resonance. , 2004, Optics express.

[23]  Xiang Zhang,et al.  Surface plasmon interference nanolithography. , 2005, Nano letters.

[24]  H. J. Lee,et al.  Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask , 2005 .

[25]  D. Shao,et al.  Surface-plasmon-assisted nanoscale photolithography by polarized light , 2005 .

[26]  D. Tsai,et al.  Directed subwavelength imaging using a layered metal-dielectric system , 2006, physics/0608170.

[27]  David R. Smith,et al.  Metamaterial Electromagnetic Cloak at Microwave Frequencies , 2006, Science.

[28]  D. P. Fromm,et al.  Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas. , 2006, Nano letters.

[29]  Sreemanth M. V. Uppuluri,et al.  Nanolithography using high transmission nanoscale bowtie apertures. , 2006, Nano letters.

[30]  Yang Hao,et al.  Subwavelength imaging at optical frequencies using a transmission device formed by a periodic layered metal-dielectric structure operating in the canalization regime , 2006 .

[31]  Shanhui Fan,et al.  All-angle negative refraction and evanescent wave amplification using one-dimensional metallodielectric photonic crystals , 2006 .

[32]  Zhaowei Liu,et al.  Far-Field Optical Hyperlens Magnifying Sub-Diffraction-Limited Objects , 2007, Science.

[33]  V. Podolskiy,et al.  Highly confined optical modes in nanoscale metal-dielectric multilayers , 2007, physics/0703137.

[34]  Yi Xiong,et al.  Two-dimensional imaging by far-field superlens at visible wavelengths. , 2007, Nano letters.

[35]  H. Schift.  Nanoimprint lithography: An old story in modern times? A review , 2008 .

[36]  R. Rosenfeld.  Nature , 2009, Otolaryngology--head and neck surgery : official journal of American Academy of Otolaryngology-Head and Neck Surgery.