Investigation on 2D disks and stadiums micro-resonators structures based on UV210 polymer

In this paper, we report on the design and the overall realization of micro-resonators based on the development of adequate processes on UV210 polymer. These micro-optical structures are developed by deep ultraviolet lithography allowing fabrication of nano-structured devices by mean of low cost and reproducible processes. Resonant microstructures of disk and stadium shapes with various sizes were investigated. Structural and optical characterizations have been carried out to ensure their ability as integrated resonant micro-structures. At first, scanning electron microscopy studies confirm the UV-light process resolution down to 450 nm developed on UV210 polymer. Then, optical characterizations have been performed as regards spectral properties of such micro-resonators. Field intensity measurements in visible and infrared range have been realized and validate the aptitude of the micro-structures to propagate and to allow an evanescent photonic coupling between waveguides and micro-resonators. Finally, spectral analyses on TE modes demonstrate the presence of optical resonances associated to whispering gallery modes for disk structures and chaotic modes for stadium shapes. The UV210 polymer appears appropriate for the realization of microstructures requiring a few hundred nanometers gap-scale while maintaining adequate spectral properties for versatile applications in telecommunication and metrology.

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