Impact of substrate pits on laser-induced damage performance of 1064-nm high-reflective coatings.

The laser damage resistance of coatings in high-power laser systems depends significantly on the surface quality of the substrate. In our experiment, pits were precisely fabricated on the surface of fused silica substrate using a femtosecond laser processing bench. The HfO2/SiO2 high-reflective coatings at 1064 nm were deposited by conventional e-beam evaporation onto fused silica substrates with and without pits, respectively. The internal crack that was induced by the substrate geometrical structure was first observed in our experiment. The laser-induced damage threshold test showed negative effects of the substrate pits on the laser resistance of high-reflective coatings. Simulations by the finite element method were carried out, and results demonstrated that the modulation of a high reflector multilayer geometry could lead to electrical-field amplification and reduce laser damage resistance. Combined with its poor mechanical properties, the pits on substrate could contribute to the occurrence of damages.

[1]  Jian Sun,et al.  Study on high-reflective coatings of different designs at 532 nm , 2014 .

[2]  Jianda Shao,et al.  Influence of SiO2 overcoat layer and electric field distribution on laser damage threshold and damage morphology of transport mirror coatings , 2014 .

[3]  Laurent Gallais,et al.  Influence of nodular defects on the laser damage resistance of optical coatings in the femtosecond regime. , 2014, Optics letters.

[4]  Regina Soufli,et al.  High laser-resistant multilayer mirrors by nodular defect planarization [invited]. , 2014, Applied optics.

[5]  Bin Ma,et al.  Nanosecond laser-induced damage of nodular defects in dielectric multilayer mirrors [invited]. , 2014, Applied optics.

[6]  魏朝阳 Wei Chaoyang,et al.  Structure characterization of fused silica redeposition layer in nanoscale and analysis of impurities , 2014 .

[7]  Wei Sun,et al.  Damage threshold influenced by the high absorption defect at the film-substrate interface under ultraviolet laser irradiation. , 2013, Optics letters.

[8]  H. Qi,et al.  Stress mechanism of pulsed laser-driven damage in thin film under nanosecond ultraviolet laser irradiation , 2013 .

[9]  Jianda Shao,et al.  Investigations on the catastrophic damage in multilayer dielectric films. , 2013, Applied optics.

[10]  Bin Ma,et al.  Laser damage study of nodules in electron-beam-evaporated HfO2/SiO2 high reflectors. , 2011, Applied optics.

[11]  Michael D. Feit,et al.  Impact of substrate surface scratches on the laser damage resistance of multilayer coatings , 2010, Laser Damage.

[12]  Koji Sugioka,et al.  Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing. , 2010, Optics letters.

[13]  P. Miller,et al.  Fracture-induced subbandgap absorption as a precursor to optical damage on fused silica surfaces. , 2010, Optics letters.

[14]  Laurent Gallais,et al.  Investigation of nanodefect properties in optical coatings by coupling measured and simulated laser damage statistics , 2008 .

[15]  Christopher J Stolz,et al.  Laser intensification by spherical inclusions embedded within multilayer coatings. , 2006, Applied optics.

[16]  Laurent Gallais,et al.  Localized pulsed laser interaction with submicronic gold particles embedded in silica: a method for investigating laser damage initiation. , 2003, Optics express.

[17]  C J Stolz,et al.  Damage threshold prediction of hafnia-silica multilayer coatings by nondestructive evaluation of fluence-limiting defects. , 2001, Applied optics.

[18]  Z. Fan,et al.  Surface inclusion adhesion of optical coatings , 1994 .

[19]  J W Goodman,et al.  Laser-induced local heating of multilayers. , 1982, Applied optics.

[20]  H. E. Bennett,et al.  Simple expressions for predicting the effect of volume and interface absorption and of scattering in high-reflectance or antireflectance multilayer coatings , 1980 .