Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools

We describe an advanced interferometric testing system that we have built at the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. The system provides live dynamic views of microelectromechanical devices as well as precise measurements of their motions in three dimensions. A high-speed interface feeds these signals to an ultra-high-performance network (SuperNet), which can deliver them to remote locations where they can, for example, be compared to simulations. An illustrative example using a nonlinear oscillating microactuator demonstrates the utility of the system.