Probe station having thermal emission space
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A probe station is provided to improve heat dissipation efficiency by forming a heat dissipating space using a spacer interposed between a reinforcing plate and a probe card. A probe station includes a reinforcing plate(21) and a probe card. The probe card(22) is installed under the reinforcing plate. A probe pin module is installed on a lower center portion of the probe card. The probe station further includes a spacer. The spacer(26) is interposed between the reinforcing plate and the probe card. The spacer is used for forming a heat dissipating space between the reinforcing plate and the probe card.