论文信息 - Ta2Si Thermal Oxidation: A Simple Route to a High-k Gate Dielectric on 4H-SiC - 字舞流文

Ta2Si Thermal Oxidation: A Simple Route to a High-k Gate Dielectric on 4H-SiC

P. Godignon | N. Mestres | J. Millán | P. Vennégués | J. Montserrat | A. Pérez‐Tomás | J. Stoemenos