Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication

We present three-dimensional (3-D) microstructures fabricated from photopolymerizable resin with a resolution of 0.62 /spl mu/m. The method used to fabricate such small structures has been developed using a femto-second-pulsed near-infrared (IR) laser. Structures such as microcoils and microtubes are presented which demonstrate the effectiveness of our method. In this method, a two-photon absorption process is successfully utilized to confine the solidification of photopolymerizable resin to the focused spot of the laser, which is possible due to the quadratic dependence of the two-photon absorption rate on light intensity. The experimental system, experimental conditions, and related issues for this novel method of photopolymerization are also discussed.

[1]  W. Denk,et al.  Two-photon laser scanning fluorescence microscopy. , 1990, Science.

[2]  Koji Ikuta,et al.  New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[3]  S. Kawata,et al.  Gold-bead scanning near-field optical microscope with laser-force position control. , 1997, Optics letters.

[4]  S Kawata,et al.  Optically driven Mie particles in an evanescent field along a channeled waveguide. , 1996, Optics letters.

[5]  K. Ikuta,et al.  Real three dimensional micro fabrication using stereo lithography and metal molding , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[6]  J. Strickler,et al.  Three-dimensional optical data storage in refractive media by two-photon point excitation. , 1991, Optics letters.

[7]  S. Kawata,et al.  Two-photon-absorbed photopolymerization for three-dimensional microfabrication , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[8]  H. Kano,et al.  Two-photon-excited fluorescence enhanced by a surface plasmon. , 1996, Optics letters.

[9]  S. Kawata,et al.  Three-dimensional microfabrication with two-photon-absorbed photopolymerization. , 1997, Optics letters.

[10]  J. Jersch,et al.  Nanostructure fabrication using laser field enhancement in the near field of a scanning tunneling microscope tip , 1996 .

[11]  A. Yariv,et al.  Self-focusing and self-trapping of optical beams upon photopolymerization. , 1996, Optics letters.

[12]  Koji Ikuta,et al.  Biochemical IC chip toward cell free DNA protein synthesis , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[13]  Satoshi Kawata,et al.  Near-Field Scanning Optical Microscope with a Laser Trapped Probe , 1994 .

[14]  Yaochun Shen.  Principles of nonlinear optics , 1984 .

[15]  S. Hell,et al.  Aberrations in confocal fluorescence microscopy induced by mismatches in refractive index , 1993 .

[16]  D A Parthenopoulos,et al.  Three-Dimensional Optical Storage Memory , 1989, Science.