Biochemical sensors based on bulk acoustic wave resonators

A new general purpose approach for a sensor based on a mass-weighting principle has been developed. This concept offers the advantage to replace a complex and expensive optical system by a low-cost electronic readout system. In contrast to all established sensor principles the system only depends on the availability of specific probe molecules attached at the surface. The biochemical sensor principle is based on a film bulk acoustic wave resonator which detects mass differences on a biochemical prepared surface.