论文信息 - Analysis and improvement of dynamic characteristic of 3-axis nano stage

Analysis and improvement of dynamic characteristic of 3-axis nano stage

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, the subresonance occurred by the disaccord of the force center and the mass center should be oppressed. It is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

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