论文信息 - Impact of Ge pre-amorphization implantation on Co/Co-Ti/n+-Si contacts in advanced Co interconnects - 字舞流文

Impact of Ge pre-amorphization implantation on Co/Co-Ti/n+-Si contacts in advanced Co interconnects

Tianchun Ye | Jun Luo | Yaodong Liu | Jianfeng Gao | A. Du | Guilei Wang | Junfeng Li | Chao Zhao | Wenwu Wang | Dapeng Chen | P. Liu | Shihai Gu | Jing Xu | Dan Zhang | S. Mao | Xue Luo | Jing Zhang | Yang Men