Fabrication and properties of F-doped silica glasses via sol-gel technique

Ultra low OH, fluorine-doped silica glasses have been successfully synthesized via sol-gel technique. The maximum relative refractive index difference to pure silica of -1.0% is obtained. Characterization of various levels of fluorine-doped silica glasses was performed by measuring vacuum ultraviolet spectra. Fluorine concentration in silica glasses strongly depends on the gel formulation, and sintering conditions. We have developed VUV/DUV transmission optical materials in various geometries, such as plates, tubes and discs. Transmission more than 80% at 157 nm is achieved with various F-doping levels silica glasses for 6.35 mm thickness.