A minimum zone method for evaluating flatness error of gage blocks measured by phase‐shifting interferometry

Abstract A new method called “Control Plane Rotation Scheme (CPRS)” has been developed here for the analysis of flatness error in terms of the minimum zone definition, which conforms to the ISO/R1101 specification. An application of the phase‐shifting interferometry was performed for on‐line measurement of gage blocks. Experimental results were quite consistent with the specified grade of the inspected gage block with only an uncertainty of up to 0.005 μm.

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