Microscopic 3D measurement of shiny surfaces based on a multi-frequency phase-shifting scheme

Abstract Microscopic fringe projection profilometry is a powerful 3D measurement technique with a theoretical measurement accuracy better than one micron. However, the defocus of the dense fringe and complex surface reflexivity characteristics usually cause intensity saturation and decrease the fringe quality, which makes the complete 3D reconstruction difficult. To address this problem, we calculate the phase of the highlighted areas from a subset of the phase-shifted fringe images which are not subjected to intensity saturation. A multi-frequency phase-shifting scheme is proposed to improve the integrity of the final phase map of the shiny surface, based on which we can achieve a complete and high-accuracy 3D reconstruction combined with a microscopic telecentric stereo system. Experimental results of different highlight surfaces demonstrate that our approach can retrieve the complete morphology of shiny surfaces with high accuracy and reliability.

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