In distribution in InGaAs quantum wells and quantum islands

The In distribution in epitaxial InGaAs layers grown by molecular-beam epitaxy on GaAs (001) was investigated using transmission electron microscopy (TEM). InGaAs layers with In concentrations between 16 % and 28 % were deposited at temperatures between 500 °C and 548 °C. In concentration profiles were obtained from high-resolution TEM images by composition evaluation by lattice fringe analysis. The quantum wells and quantum islands are characterized by an asymmetric In distribution demonstrating the strong influence of In segregation. A significant increase of the In segregation efficiency is observed with increasing growth temperature.