论文信息 - Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm

Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm

A fiber-optic Fabry-Pérot acoustic sensor with a ~100-nm-thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure-induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of ~ 60 μPa/Hz1/2 at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.

[1] Alain C. Diebold,et al. Optical properties of large-area polycrystalline chemical vapor deposited graphene by spectroscopic ellipsometry , 2010 .

[2] T. Szkopek,et al. Optical reflection and transmission properties of exfoliated graphite from a graphene monolayer to several hundred graphene layers , 2010, Nanotechnology.

[3] Martin L Dunn,et al. Ultrastrong adhesion of graphene membranes. , 2011, Nature nanotechnology.

[4] Jian Ju,et al. A Compact Fiber-Tip Micro-Cavity Sensor for High-Pressure Measurement , 2011, IEEE Photonics Technology Letters.

[5] Zhao Zhang,et al. Substrate-regulated morphology of graphene , 2010 .

[6] Feng Xu,et al. High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm. , 2012, Optics letters.

[7] Brian H. Houston,et al. Miniature, high performance, low-cost fiber optic microphone , 2005 .

[8] Clay K. Kirkendall,et al. Overview of high performance fibre-optic sensing , 2004 .

[9] K. Cooper,et al. Miniature all-silica fiber optic pressure and acoustic sensors. , 2005, Optics letters.

[10] Jun Ma,et al. High-sensitivity fiber-tip pressure sensor with graphene diaphragm. , 2012, Optics letters.

[11] Anbo Wang,et al. Fiber Fabry-Perot sensors for detection of partial discharges in power transformers. , 2003, Applied optics.

[12] Olav Solgaard,et al. External fibre Fabry–Perot acoustic sensor based on a photonic-crystal mirror , 2006 .