Development of a bi-directional valve-less silicon micro pump controlled by driving waveform

A new bi-directional valve-less silicon micro pump was proposed based on an analysis using an equivalent circuit model, and the performance of the fabricated pump was studied. The flow direction of the pump can be controlled by changing a driving waveform applied to a PZT plate fixed on a diaphragm. The feasibility of this new bi-directional pumping principle was verified by experiments. The pump generated maximum flow rates of 393 nl/s for forward direction and 323 nl/s for backward direction and maximum pumping pressures of 11.0 kPa for forward direction and 9.9 kPa for backward direction.

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