SR phase contrast imaging to address the evolution of defects during SiC growth

Sliced SiC boule grown by physical vapor transport is investigated using synchrotron white beam phase contrast imaging combined with Bragg diffraction. The evolution of defects is revealed. In the early growth stage, foreign polytype inclusions not only induce massive generation of full‐core dislocations and dislocated micropipes but also attract them, forming slit‐type pores at the boundaries of inclusions.

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