Microfluidics Section: Design and Fabrication of Integrated Passive Valves and Pumps for Flexible Polymer 3-Dimensional Microfluidic Systems

This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.

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