Optical measurement methods to study dynamic behavior in MEMS

The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

[1]  D. M. Freeman,et al.  Statistics of subpixel registration algorithms based on spatiotemporal gradients or block matching , 1998 .

[2]  Eberhard P. Hofer,et al.  High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect , 1999 .

[3]  D. M. Freeman,et al.  Using a light microscope to measure motions with nanometer accuracy , 1998 .

[4]  Richard S. Muller,et al.  Dynamic deformation of scanning mirrors , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).

[5]  D. M. Freeman,et al.  Nanometer resolution of three-dimensional motions using video interference microscopy , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[6]  R. Muller,et al.  Stroboscopic interferometer system for dynamic MEMS characterization , 2000, Journal of Microelectromechanical Systems.

[7]  John A. Nelder,et al.  A Simplex Method for Function Minimization , 1965, Comput. J..

[8]  Jason V. Clark,et al.  Modified Nodal Analysis for MEMS with Multi-Energy Domains , 2000 .

[9]  Christian Rembe,et al.  Full three-dimensional motion characterization of a gimballed electrostatic microactuator , 2001, 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167).

[10]  Eric Walter,et al.  Identification of Parametric Models: from Experimental Data , 1997 .

[11]  A. Pisano,et al.  Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope , 2022 .

[12]  R. Howe,et al.  Electrical isolation process for molded, high-aspect-ratio polysilicon microstructures , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[13]  Christian Rembe,et al.  Analysis of the dynamics in microactuators using high-speed cine photomicrography , 2001 .

[14]  Richard S. Muller,et al.  Lightweight, optically flat micromirrors for fast beam steering , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).

[15]  R. Howe,et al.  Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).

[16]  Christian Rembe,et al.  Nonreproducible phenomena in thermal ink jets with real high-speed cine photomicrography , 1998, Other Conferences.