A Novel MOCVD Technology using Liquid Source

A novel MOCVD technology using liquid MO source was introduced. The pulsed-liquid MO source transportation technology was employed. As the application of the PLC and the touch screen, system control,process parameter settings and data display can be performed through the touch screen, which improves the automatic control level of MOCVD and ensures the repeatability and stability of the process.The TiO2 film was successfully achieved by using this technology.