论文信息 - Local laser annealing of 3C-SiC film deposited on the silicon substrate by CVD - 字舞流文

Local laser annealing of 3C-SiC film deposited on the silicon substrate by CVD

N. I. Kargin | V. Labunov | I. Komissarov | V. Fominski | R. Romanov | M. M. Mikhalik | A. Gusev | S. M. Ryndya | N. V. Siglovaya | A. Avramchuk | A. O. Sultanov