Microfabrication, Microstructures and Microsystems

[1]  S. Shoji.  Micro Total Analysis Systems , 1999 .

[2]  George M. Whitesides,et al.  Fabrication and characterization of a concentric cylindrical microtransformer , 1997 .

[3]  George M. Whitesides,et al.  Demonstration of waveguide couplers fabricated using microtransfer molding , 1997 .

[4]  G M Whitesides,et al.  Wave-front engineering by use of transparent elastomeric optical elements. , 1997, Applied optics.

[5]  George M. Whitesides,et al.  Solvent‐assisted microcontact molding: A convenient method for fabricating three‐dimensional structures on surfaces of polymers , 1997 .

[6]  George M. Whitesides,et al.  Fabrication and Characterization of Glassy Carbon MEMS , 1997 .

[7]  George M. Whitesides,et al.  Microcontact printing and electroplating on curved substrates: Production of free‐standing three‐dimensional metallic microstructures , 1997 .

[8]  George M. Whitesides,et al.  Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors , 1997 .

[9]  G. Whitesides,et al.  Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field , 1997 .

[10]  George M. Whitesides,et al.  Extending Microcontact Printing as a Microlithographic Technique , 1997 .

[11]  George M. Whitesides,et al.  Fabrication of polymeric microstructures with high aspect ratios using shrinkable polystyrene films , 1997 .

[12]  George M. Whitesides,et al.  Replica molding using polymeric materials: A practical step toward nanomanufacturing , 1997 .

[13]  André Goffeau,et al.  Molecular fish on chips , 1997, Nature.

[14]  A. Ewing,et al.  Electrochemical Analysis in Picoliter Microvials , 1997 .

[15]  Jonathan M. Cooper,et al.  Micromachining Sensors for Electrochemical Measurement in Subnanoliter Volumes , 1997 .

[16]  Margaret Evans Best,et al.  Nanoscale replication for scanning probe data storage , 1996 .

[17]  G. Whitesides,et al.  Microcontact printing with a cylindrical rolling stamp: A practical step toward automatic manufacturing of patterns with submicrometer-sized features† , 1996 .

[18]  Ronald W. Davis,et al.  Quantitative phenotypic analysis of yeast deletion mutants using a highly parallel molecular bar–coding strategy , 1996, Nature Genetics.

[19]  G M Whitesides,et al.  Elastomeric diffraction gratings as photothermal detectors. , 1996, Applied optics.

[20]  George M. Whitesides,et al.  Rapid prototyping of complex structures with feature sizes larger than 20 μm , 1996 .

[21]  R. Nuzzo,et al.  A monolayer-based lift-off process for patterning chemical vapor deposition copper thin films , 1996 .

[22]  G. Whitesides,et al.  Fabrication of three‐dimensional micro‐structures: Microtransfer molding , 1996 .

[23]  D E Ingber,et al.  Controlling cell attachment on contoured surfaces with self-assembled monolayers of alkanethiolates on gold. , 1996, Proceedings of the National Academy of Sciences of the United States of America.

[24]  G. Whitesides,et al.  Shadowed sputtering of gold on V ‐shaped microtrenches etched in silicon and applications in microfabrication , 1996 .

[25]  N. C. MacDonald,et al.  SCREAM MicroElectroMechanical Systems , 1996 .

[26]  George M. Whitesides,et al.  Elastomeric binary phase gratings for measuring acceleration, displacement, strain, and stress , 1996 .

[27]  George M. Whitesides,et al.  Pattern transfer: Self-assembled monolayers as ultrathin resists , 1996 .

[28]  George M. Whitesides,et al.  Non-Photolithographic Methods for Fabrication of Elastomeric Stamps for Use in Microcontact Printing , 1996 .

[29]  G. Whitesides,et al.  Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters , 1996, Science.

[30]  G. Whitesides,et al.  Micromolding of Polymers in Capillaries: Applications in Microfabrication , 1996 .

[31]  G. Kovacs,et al.  Peer Reviewed: Silicon Micromachining: Sensors to Systems , 1996 .

[32]  A. Manz,et al.  Micellar electrokinetic chromatography separations and analyses of biological samples on a cyclic planar microstructure. , 1996, Analytical chemistry.

[33]  N. Shen,et al.  Extensive polymorphisms observed in HIV–1 clade B protease gene using high–density oligonucleotide arrays , 1996, Nature Medicine.

[34]  George M. Whitesides,et al.  Micromolding in Capillaries: Applications in Materials Science , 1996 .

[35]  R. Sagdeev,et al.  A 31P-SNP study of the photolysis of (2,4,6-trimethylbenzoyl) diphenylphosphine oxide in micelles of different sizes , 1996 .

[36]  George M. Whitesides,et al.  Fabrication of single‐mode polymeric waveguides using micromolding in capillaries , 1996 .

[37]  D. Huang,et al.  Complexometric determination of metal ions by microscopic diffusional titration. , 1996, Analytical chemistry.

[38]  S. Chou,et al.  Imprint Lithography with 25-Nanometer Resolution , 1996, Science.

[39]  L. McGown,et al.  TOWARD BUILDING A BETTER MICROREACTOR : INCREASING MICROENVIRONMENTAL DIVERSITY IN AOT REVERSED MICELLES USING A BILE SALT COSURFACTANT , 1996 .

[40]  B L Ramos,et al.  Embossable grating couplers for planar waveguide optical sensors. , 1996, Analytical chemistry.

[41]  G. Whitesides,et al.  Microcontact Printing of Palladium Colloids: Micron-Scale Patterning by Electroless Deposition of Copper , 1996 .

[42]  G. Whitesides,et al.  Microcontact Printing of Alkanethiols on Silver and Its Application in Microfabrication , 1996 .

[43]  George M. Whitesides,et al.  Two‐ and three‐dimensional crystallization of polymeric microspheres by micromolding in capillaries , 1996 .

[44]  Harold G. Craighead,et al.  Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates , 1996 .

[45]  Yu-Chong Tai,et al.  Silicon Microactuators for Computer Disk Drives , 1996 .

[46]  C. D'silva,et al.  Encapsulation of an integrated thin-film multi-electrode sensor using photocurable poly(styrene) , 1996 .

[47]  George M. Whitesides,et al.  Microcontact printing of alkanethiols on copper and its application in microfabrication , 1996 .

[48]  G. Paula,et al.  MEMS sensors branch out , 1996 .

[49]  L. Y. Lin,et al.  Integrated devices make an optical bench on a chip , 1996 .

[50]  R. S. Patel,et al.  Via production benefits from excimer-laser tools , 1996 .

[51]  B. Löchel,et al.  Ultraviolet Depth Lithography and Galvanoforming for Micromachining , 1996 .

[52]  R. Steinkuhl,et al.  Micromachined glucose sensor , 1996 .

[53]  R. Fischer,et al.  Laser direct writing of β‐Co/Ga and Mn/Ga alloy microstructures from organometallic single‐source precursors , 1996 .

[54]  K.W. Markus,et al.  MEMS: Small Machines for the Microelectronics Age , 1996, Computer.

[55]  A. Blanchard,et al.  High-density oligonucleotide arrays , 1996 .

[56]  Olaf Lehmann,et al.  Laser-Driven Movement of Three-Dimensional Microstructures Generated by Laser Rapid Prototyping , 1995, Science.

[57]  George M. Whitesides,et al.  A Selective Etching Solution for Use with Patterned Self-Assembled Monolayers of Alkanethiolates on Gold , 1995 .

[58]  Stephen Y. Chou,et al.  Imprint of sub-25 nm vias and trenches in polymers , 1995 .

[59]  C. Schönenberger,et al.  Resistless high resolution optical lithography on silicon , 1995 .

[60]  Madhav Datta,et al.  Fabrication of an array of precision nozzles by through-mask electrochemical micromachining , 1995 .

[61]  T. Moffat,et al.  Patterned Metal Electrodeposition Using an Alkanethiolate Mask , 1995 .

[62]  R. Takigiku,et al.  Online Microreactors/Capillary Electrophoresis/Mass Spectrometry for the Analysis of Proteins and Peptides , 1995 .

[63]  A. Hubbard.  The Handbook of Surface Imaging and Visualization , 1995 .

[64]  P. Schultz,et al.  A Class of Cobalt Oxide Magnetoresistance Materials Discovered with Combinatorial Synthesis , 1995, Science.

[65]  S. S. Lee,et al.  Surface‐micromachined free‐space micro‐optical systems containing three‐dimensional microgratings , 1995 .

[66]  J. Loizeaux,et al.  Demolition by Implosion , 1995 .

[67]  George M. Whitesides,et al.  Microcontact printing of octadecylsiloxane on the surface of silicon dioxide and its application in microfabrication , 1995 .

[68]  G M Whitesides,et al.  Fabrication of submicrometer features on curved substrates by microcontact printing. , 1995, Science.

[69]  Lih Y. Lin,et al.  Micromachined free-space integrated micro-optics , 1995 .

[70]  P. Kaye,et al.  A silicon micromachined device for use in blood cell deformability studies , 1995, IEEE Transactions on Biomedical Engineering.

[71]  G. Whitesides,et al.  Polymer microstructures formed by moulding in capillaries , 1995, Nature.

[72]  George M. Whitesides,et al.  Patterned self-assembled monolayers formed by microcontact printing direct selective metalization by chemical vapor deposition on planar and nonplanar substrates , 1995 .

[73]  G. Whitesides,et al.  Lithographic molding: A convenient route to structures with sub‐micrometer dimensions** , 1995 .

[74]  J. Michael Ramsey,et al.  Fused Quartz Substrates for Microchip Electrophoresis , 1995 .

[75]  J. M. Noworolski,et al.  Fabrication Of SOI Wafers With Buried Cavities Using Silicon Fusion Bonding And Electrochemical Etchback , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[76]  M. Nese,et al.  Batch processing for micromachined devices , 1995 .

[77]  George M. Whitesides,et al.  Patterning self-assembled monolayers using microcontact printing: A new technology for biosensors? , 1995 .

[78]  R. Crooks,et al.  Polymeric Self-Assembled Monolayers. 3. Pattern Transfer by Use of Photolithography, Electrochemical Methods, and an Ultrathin Self-Assembled Diacetylenic Resist , 1995 .

[79]  G. Whitesides,et al.  Patterned Self-Assembled Monolayers and Meso-Scale Phenomena , 1995 .

[80]  R. Ghodssi,et al.  Use of photosensitive polyimide for deep x‐ray lithography , 1995 .

[81]  T. Baykara,et al.  A new ceramic thread-guide composition via low-pressure injection molding , 1995 .

[82]  Douglas Carlyle Neckers,et al.  Mechanical Properties of Acrylate Networks Formed by Visible Laser-Induced Polymerization. 2. Control of the Mechanical Properties , 1995 .

[83]  F. Wallenberger.  Rapid Prototyping Directly from the Vapor Phase , 1995, Science.

[84]  G. Whitesides,et al.  Self-Assembled Monolayers of Long-Chain Hydroxamic Acids on the Native Oxides of Metals , 1995 .

[85]  A. Berg,et al.  Micro Total Analysis Systems , 1995 .

[86]  Jo W. Spronck,et al.  Finite-element modelling as a tool for designing capacitive position sensors , 1995 .

[87]  M. R. Tarasevich,et al.  Principles of electrochemical biosensor development , 1995 .

[88]  C. Frisbie,et al.  Systems for orthogonal self-assembly of electroactive monolayers on Au and ITO: an approach to molecular electronics , 1995 .

[89]  T. Lee,et al.  Microscale immobilized protease reactor columns for peptide mapping by liquid chromatography/mass spectral analyses. , 1995, Analytical biochemistry.

[90]  Howard E. Katz.  Multilayer deposition of novel organophosphonates with zirconium(IV) , 1994 .

[91]  Kristofer S. J. Pister,et al.  Micro-machined three-dimensional micro-optics for integrated free-space optical system , 1994, IEEE Photonics Technology Letters.

[92]  Ann P. Kinzig,et al.  Human impacts on the nitrogen cycle , 1994 .

[93]  Mark G. Allen,et al.  Development of micromachined devices using polyimide-based processes , 1994 .

[94]  Andreas Manz,et al.  High-Speed Separation of Antisense Oligonucleotides on a Micromachined Capillary Electrophoresis Device , 1994 .

[95]  Andreas Manz,et al.  Continuous Sample Pretreatment Using a Free-Flow Electrophoresis Device Integrated onto a Silicon Chip , 1994 .

[96]  David L. Allara,et al.  An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition Temperature , 1994 .

[97]  Stephen C. Jacobson,et al.  Open channel electrochromatography on a microchip , 1994 .

[98]  M. Gratzl,et al.  Diffusional microtitration : reagent delivery by a diffusional microburet into microscopic samples , 1994 .

[99]  J. Bryzek,et al.  Micromachines on the march , 1994, IEEE Spectrum.

[100]  George M. Whitesides,et al.  Patterning Self-Assembled Monolayers: Applications in Materials Science , 1994 .

[101]  J. Michael Ramsey,et al.  Effects of injection schemes and column geometry on the performance of microchip electrophoresis devices , 1994 .

[102]  E Tamiya,et al.  Multisample analysis using an array of microreactors for an alternating-current field-enhanced latex immunoassay. , 1994, Analytical chemistry.

[103]  J. Hemminger,et al.  Photopatterning of self-assembled alkanethiolate monolayers on gold. A simple monolayer photoresist utilizing aqueous chemistry , 1994 .

[104]  P. D. Prewett,et al.  Microlithography: An overview , 1994 .

[105]  L. Noethe,et al.  Active Optics, Adaptive Optics, and Laser Guide Stars , 1993, Science.

[106]  A. Manz,et al.  Glass chips for high-speed capillary electrophoresis separations with submicrometer plate heights , 1993 .

[107]  J. Heinze.  Ultramicroelectrodes in Electrochemistry , 1993 .

[108]  D. J. Harrison,et al.  Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip , 1993, Science.

[109]  S. P. Fodor,et al.  Multiplexed biochemical assays with biological chips , 1993, Nature.

[110]  J. Kotthaus,et al.  The Spectroscopy of Quantum Dot Arrays , 1993 .

[111]  Timothy W. Weidman,et al.  New photodefinable glass etch masks for entirely dry photolithography: Plasma deposited organosilicon hydride polymers , 1993 .

[112]  Michael Stuke,et al.  Liquid precursor two‐step aluminum thin‐film deposition on KrF‐laser patterned palladium , 1992 .

[113]  R. Nuzzo,et al.  Synthesis, Structure, and Properties of Model Organic Surfaces , 1992 .

[114]  Thomas E. Mallouk,et al.  LAYERED METAL PHOSPHATES AND PHOSPHONATES : FROM CRYSTALS TO MONOLAYERS , 1992 .

[115]  S. Beaucage,et al.  Advances in the Synthesis of Oligonucleotides by the Phosphoramidite Approach , 1992 .

[116]  P. Fromherz,et al.  A neuron-silicon junction: a Retzius cell of the leech on an insulated-gate field-effect transistor. , 1991, Science.

[117]  W. Michaeli,et al.  Metal injection molding: Shaping sintered metal parts , 1991 .

[118]  S. P. Fodor,et al.  Light-directed, spatially addressable parallel chemical synthesis. , 1991, Science.

[119]  T. J. Hirsch,et al.  Selective‐area electroless copper plating on polyimide employing laser patterning of a catalytic film , 1990 .

[120]  K. Wise,et al.  A bulk silicon SOI process for active intevated sensor , 1990 .

[121]  A. Manz,et al.  Design of an open-tubular column liquid chromatograph using silicon chip technology , 1990 .

[122]  A. Ulman,et al.  Ultrathin organic films: From Langmuir-Blodgett to self assembly , 1991 .

[123]  Georg Pawlowski,et al.  Materials for Optical Data Storage , 1989 .

[124]  Russell A. Chipman,et al.  Wavefront correcting properties of corner-cube arrays. , 1988, Applied optics.

[125]  J. Lasky.  Wafer bonding for silicon‐on‐insulator technologies , 1986 .

[126]  H. Philipp,et al.  Dependence of photoetching rates of polymers at 193 nm on optical absorption depth , 1986 .

[127]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[128]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[129]  M. Gell-Mann,et al.  Physics Today. , 1966, Applied optics.

[130]  Echellette reflection grating,et al.  Diffraction Gratings , 1951, Nature.

[131]  Jerry Avorn.  Technology , 1929, Nature.

[132]  IEEE Spectrum , 2022 .