Alternative piezoresistor designs for maximizing cantilever sensitivity

[1]  Teodor Gotszalk,et al.  Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection , 2001 .

[2]  H. Butt,et al.  Measuring surface forces in aqueous electrolyte solution with the atomic force microscope , 1995 .

[3]  I. Shimoyama,et al.  Force sensing submicrometer thick cantilevers with ultra-thin piezoresistors by rapid thermal diffusion , 2004 .

[4]  O. Hansen,et al.  Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement , 2000 .

[5]  Richard M. White,et al.  Self-excited piezoelectric cantilever oscillators , 1996 .

[6]  Y Chen,et al.  Nanofabrication: Conventional and nonconventional methods , 2001, Electrophoresis.

[7]  Martin Hegner,et al.  Cantilever array sensors , 2005 .

[8]  M. Tortonese,et al.  Low temperature magnetic force microscope utilizing a piezoresistive cantilever , 1994 .

[9]  Xavier Borrisé,et al.  Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection , 2001 .

[10]  Thomas Thundat,et al.  Vapor detection using resonating microcantilevers , 1995 .

[11]  Pierre Müller,et al.  About the measurement of absolute isotropic surface stress of crystals , 1994 .

[12]  Wensyang Hsu,et al.  An electro-thermally and laterally driven polysilicon microactuator , 1997 .

[13]  Li Wang,et al.  A MEMS differential calorimeter for biomolecular characterization , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[14]  Tetsuya Inui,et al.  An ink-jet head using diaphragm microactuator , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[15]  T. Krummel,et al.  Microelectrical mechanical systems in surgery and medicine1 , 2002 .

[16]  O. Sbaizero,et al.  Dynamic characterization of MEMS cantilevers in liquid environment using a low-cost optical system , 2006 .

[17]  L. Sekaric,et al.  Measurement of mechanical resonance and losses in nanometer scale silicon wires , 1999 .

[18]  T. Kenny,et al.  Attonewton force detection using ultrathin silicon cantilevers , 1997 .

[19]  Amit K. Gupta,et al.  Single virus particle mass detection using microresonators with nanoscale thickness , 2004 .

[20]  B. Jakoby,et al.  Evaluation of a vibrating micromachined cantilever sensor for measuring the viscosity of complex organic liquids , 2005 .

[21]  C. Mastrangelo,et al.  SIMPLE, HIGH ACTUATION POWER, THERMALLY ACTIVATED PARAFFIN MICROACTUATOR , 1999 .

[22]  S. Natarajan,et al.  Gas sensing using carbon nanotube-based resonator , 2004, Proceedings of IEEE Sensors, 2004..

[23]  Isao Shimoyama,et al.  CMOS drivable electrostatic microactuator with large deflection , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[24]  J. M. Noworolski,et al.  Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures , 1996 .

[25]  J. Hoh,et al.  A biosensor based on micromechanical interrogation of living cells. , 1997, IEEE engineering in medicine and biology magazine : the quarterly magazine of the Engineering in Medicine & Biology Society.

[26]  Alan G. R. Evans,et al.  Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing , 2002 .

[27]  Wen Hwa Chu,et al.  Analysis of tip deflection and force of a bimetallic cantilever microactuator , 1993 .

[28]  N. Amer,et al.  Novel optical approach to atomic force microscopy , 1988 .

[29]  M. Madou.  Fundamentals of microfabrication , 1997 .

[30]  T. Thundat,et al.  Investigating the Mechanical Effects of Adsorption of Ca2+ Ions on a Silicon Nitride Microcantilever Surface , 2002 .

[31]  M. Roukes,et al.  Sensitive detection of nanomechanical motion using piezoresistive signal downmixing , 2005 .

[32]  Adolfo Cobo,et al.  New approach using a bare fiber optic cantilever beam as a low‐frequency acceleration measuring element , 1996 .

[33]  S. P. Beaumont,et al.  Dry etching damage in III–V semiconductors , 1996 .

[34]  M. Okandan,et al.  Impact of polysilicon dry etching on 0.5 /spl mu/m NMOS transistor performance: the presence of both plasma bombardment damage and plasma charging damage , 1994, IEEE Electron Device Letters.

[35]  D Leech,et al.  Characterisation of an antibody coated microcantilever as a potential immuno-based biosensor. , 2002, Biosensors & bioelectronics.

[36]  F. Laermer,et al.  Challenges, developments and applications of silicon deep reactive ion etching , 2003 .

[37]  Byung Man Kwak,et al.  A skew-symmetric cantilever accelerometer for automotive airbag applications , 1995 .

[38]  James K. Gimzewski,et al.  A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout , 2001 .

[39]  Masayoshi Esashi,et al.  Silicon Micromachining , 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

[40]  Calvin F. Quate,et al.  Microfabrication of cantilever styli for the atomic force microscope , 1990 .

[41]  Jack W. Judy,et al.  Microelectromechanical systems (MEMS): fabrication, design and applications , 2001 .

[42]  M. Roukes.  Nanoelectromechanical systems face the future , 2001 .

[43]  C. Quate,et al.  Atomic resolution with an atomic force microscope using piezoresistive detection , 1993 .

[44]  Rashid Bashir,et al.  Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water. , 2007, Biosensors & bioelectronics.

[45]  C. D. Rios,et al.  RF MEMS from a device perspective , 2000 .

[46]  Richard J. Colton,et al.  Biosensor based on force microscope technology , 1996 .

[47]  T. Krummel,et al.  Microelectrical mechanical systems in surgery and medicine. , 2002, Journal of the American College of Surgeons.

[48]  S. Sze.  Semiconductor Devices: Physics and Technology , 1985 .

[49]  K. L. Scott,et al.  Electrostatic charge and field sensors based on micromechanical resonators , 2003 .

[50]  Yilong Hao,et al.  The compatibility of ZnO piezoelectric film with micromachining process , 2003 .

[51]  CO2 detection using carbon nanotube networks and micromachined resonant transducers , 2005 .

[52]  T L Porter,et al.  Investigation of the antigen antibody reaction between anti-bovine serum albumin (a-BSA) and bovine serum albumin (BSA) using piezoresistive microcantilever based sensors. , 2003, Biosensors & bioelectronics.

[53]  Vinayak P. Dravid,et al.  Microcantilever resonance-based DNA detection with nanoparticle probes , 2003 .

[54]  W. von Münch,et al.  Piezoelectric bimorph cantilever for actuating and sensing applications , 1998 .

[55]  Christiane Ziegler,et al.  Cantilever-based biosensors , 2004, Analytical and bioanalytical chemistry.

[56]  E. Fukada,et al.  Piezoelectric properties in the composite systems of polymers and PZT ceramics , 1979 .

[57]  M. Roukes,et al.  Ultrasensitive nanoelectromechanical mass detection , 2004, cond-mat/0402528.

[58]  F. Volklein,et al.  Thermoelectric microsensors and microactuators (MEMS) fabricated by thin film technology and micromachining , 1999, Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407).

[59]  Panos G. Datskos,et al.  Chemical detection based on adsorption-induced and photoinduced stresses in microelectromechanical systems devices , 2001 .

[60]  M. Sepaniak,et al.  Cantilever transducers as a platform for chemical and biological sensors , 2004 .

[61]  Michael P. Eastman,et al.  Sensor based on piezoresistive microcantilever technology , 2001 .

[62]  H. Craighead,et al.  Mechanical resonant immunospecific biological detector , 2000 .

[63]  Thomas Thundat,et al.  Detection of pH variation using modified microcantilever sensors , 2001 .

[64]  Mustafa Culha,et al.  Nanostructured microcantilevers with functionalized cyclodextrin receptor phases: self-assembled monolayers and vapor-deposited films. , 2002, Analytical chemistry.

[65]  Thomas Thundat,et al.  A novel self-assembled monolayer (SAM) coated microcantilever for low level caesium detection , 2000 .

[66]  Steven T. Walsh,et al.  Critical point drying and cleaning for MEMS technology , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[67]  Yu Wang,et al.  Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers , 2003 .

[68]  Daniel Rugar,et al.  Sub-attonewton force detection at millikelvin temperatures , 2001 .

[69]  E. A. Wachter,et al.  Detection of mercury vapor using resonating microcantilevers , 1995 .

[70]  M.P. da Cunha,et al.  High temperature SAW gas sensor on langasite , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[71]  James K. Gimzewski,et al.  An artificial nose based on a micromechanical cantilever array , 1999 .

[72]  Peter Vettiger,et al.  A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors , 1998 .

[73]  F. Marty,et al.  Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures , 2005, Microelectron. J..

[74]  P V Bonnesen,et al.  Ultrasensitive detection of CrO4(2-) using a microcantilever sensor. , 2001, Analytical chemistry.

[75]  Caroline Sunyong Lee,et al.  Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application , 2003 .

[76]  T. Kenny,et al.  A high-performance planar piezoresistive accelerometer , 2000, Journal of Microelectromechanical Systems.

[77]  Nadim Maluf,et al.  An Introduction to Microelectromechanical Systems Engineering , 2000 .

[78]  Bruce W. Alphenaar,et al.  Viscous damping of microresonators for gas composition analysis , 2006 .

[79]  F. J. V. Preissig.  Applicability of the classical curvature-stress relation for thin films on plate substrates , 1989 .

[80]  J. Fluitman,et al.  Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry , 1992 .

[81]  O. N. Tufte,et al.  Piezoresistive Properties of Silicon Diffused Layers , 1963 .

[82]  T. Kenny.  Nanometer-scale force sensing with MEMS devices , 2001, IEEE Sensors Journal.

[83]  Peter Vettiger,et al.  Piezoresistive cantilever designed for torque magnetometry , 1998 .