论文信息 - Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses. - 字舞流文

Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses.

K. Sakaue | H. Ogawa | M. Nishikino | H. Mimura | K. Yamanouchi | T. Shibuya | M. Ishino | T. Higashiguchi | R. Kuroda | A. Iwasaki | T. Dinh | R. Hayashi | H. Motoyama