Microwave resonators from YBa2Cu3O7−δ thin films made by plasma‐enhanced metalorganic chemical vapor deposition

Epitaxial YBa2Cu3O7−δ thin films on LaAlO3 deposited by plasma‐enhanced metalorganic chemical vapor deposition were tested in a 100 GHz microwave cavity and as patterned 5.6 GHz resonators. Two films, both having high critical temperature (≳90 K) and high critical current density (≳106 A/cm2), exhibited low‐power Q’s of 5400 and 8000 as 5.6 GHz microstrip resonators when operated at 77 K. The equivalent surface resistances at 10 GHz are 1.7 and 1 mΩ, respectively. Despite the fact that these films are thinner than typical laser ablation films, the results are within a factor of 2 of the best laser ablation prepared YBa2Cu3O7−δ films.

[1]  J. Sun,et al.  Microwave performance-property relationships of YBa2Cu3O7-δ thin films grown on LaAlO3 (001) substrate , 1992 .

[2]  T. Hirai,et al.  Electron channeling pattern determination of crystallinity and crystallographic orientation in YBa2Cu3O7−δ thin films , 1991 .

[3]  J. Sun,et al.  Electron channeling patterns of a-axis and c-axis YBa_2Cu_3O_7−δ thin films , 1991 .

[4]  G. V. Negrete,et al.  Microstructure and microwave properties of YBCO thin films grown on MgO and SrTiO_3 by CVD , 1991 .

[5]  J. Sun,et al.  Correlations between film properties and microwave surface resistance for YBa2Cu3O7−δ thin films on MgO , 1991 .

[6]  B. Kear,et al.  High‐quality YBa2Cu3O7−x thin films by plasma‐enhanced metalorganic chemical vapor deposition at low temperature , 1991 .

[7]  Sun,et al.  ac susceptibility response of thin-film superconductors near Tc: A theoretical study. , 1991, Physical review. B, Condensed matter.

[8]  B. Kear,et al.  Compositional effects on plasma‐enhanced metalorganic chemical vapor deposition of YBa2Cu3O7−x thin films , 1991 .

[9]  B. Kear,et al.  Large critical current densities in YBa2Cu3O7-x thin films formed by plasma-enhanced metalorganic chemical vapor deposition at reduced temperature , 1991 .

[10]  G. V. Negrete,et al.  Clear correlations observed between YBa2Cu3O7−δ thin‐film properties and GHz microwave resonator performance , 1991 .

[11]  H. M. Manasevit,et al.  10 GHz surface impedance measurements of (Y,Er)BaCuO films produced by MOCVD, laser ablation, and sputtering , 1991 .

[12]  B. Kear,et al.  High critical current densities in YBa2Cu3O7−x thin films formed by metalorganic chemical vapor deposition at 730 °C , 1991 .

[13]  B. Kear,et al.  Epitaxial thin films of YBa2Cu3O7−x on LaAlO3 substrates deposited by plasma‐enhanced metalorganic chemical vapor deposition , 1991 .

[14]  S. Matsuno,et al.  Y-Ba-Cu-O Superconducting Films with High Jc Values by MOCVD using Ba-Addition Products , 1990 .

[15]  L. C. Bourne,et al.  Low‐loss microstrip delay line in Tl2Ba2CaCu2O8 , 1990 .

[16]  K. Watanabe,et al.  Y‐Ba‐Cu‐O superconducting films prepared on SrTiO3 substrates by chemical vapor deposition , 1988 .

[17]  J. Sun,et al.  A Simple Magnetization Technique for Determining Critical Currents in Superconducting Thin Films , 1991 .

[18]  J. Sun,et al.  Electron Channeling Pattern: A Tool for Studying YBaCuO-HTSC Thin Films , 1990 .

[19]  Knipp.  Interaction of slow electrons with density fluctuations in condensed materials: Calculation of stopping power. , 1988, Physical review. B, Condensed matter.