Reliability Study of Low-Voltage RF MEMS Switches

The reliability and performance of a low-voltage metal-tometal contact shunt RF MEMS switch is investigated. The switch featured is compatible with standard MMIC processing steps. The best rf performance shows insertion loss of less that 0.1 dB and isolation of greater than 22 dB for all frequencies up to 40 GHz. Switching times are less than 25 μs. Lifetimes of 3×10 8 cycles have been achieved for tests with no input signal, and 1.3×10 6 cycles for tests with continuous input. The failure mechanism is degradation of the metal-to-metal contact, and stiction problems have been avoided through careful processing and testing conditions.

[1]  Milton Feng,et al.  DEVELOPMENT OF BROADBAND LOW-VOLTAGE RF MEM SWITCHES , 2001 .

[2]  B. Pillans,et al.  Lifetime characterization of capacitive RF MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[3]  Gabriel M. Rebeiz,et al.  High-isolation CPW MEMS shunt switches. 2. Design , 2000 .

[4]  S. Eshelman,et al.  Performance of low-loss RF MEMS capacitive switches , 1998 .

[5]  J.A. Higgins,et al.  MEM relay for reconfigurable RF circuits , 2001, IEEE Microwave and Wireless Components Letters.

[6]  M. Feng,et al.  Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz , 1999, International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318).

[7]  Milton Feng,et al.  MECHANICALLY CONFORMAL AND ELECTRONICALLY RECONFIGURABLE APERTURES USING LOW VOLTAGE MEMS AND FLEXIBLE MEMBRANES FOR SPACE BASED RADAR APPLICATIONS , 2000 .

[8]  Charles L. Goldsmith,et al.  X-band RF MEMS phase shifters for phased array applications , 1999 .

[9]  Adele E. Schmitz,et al.  Surface-micromachined RF MEMs switches on GaAs substrates , 1999 .

[10]  R. Mihailovich,et al.  A DC-to-40 GHz four-bit RF MEMS true-time delay network , 2001, IEEE Microwave and Wireless Components Letters.

[11]  M. Mehregany,et al.  Contact physics of gold microcontacts for MEMS switches , 1998, Electrical Contacts - 1998. Proceedings of the Forty-Fourth IEEE Holm Conference on Electrical Contacts (Cat. No.98CB36238).

[12]  Milton Feng,et al.  Rf' Mem Switches I . Introduciion , 2004 .

[13]  C. Nguyen,et al.  Design of low actuation voltage RF MEMS switch , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).