RF MEMS technology for millimeter-wave radar sensors

To my wife, Cindy ii ACKNOWLEDGEMENTS As I look back upon my doctoral research work, I would like to acknowledge several people who were instrumental in helping me to complete the Ph.D. program at the University of Michigan. First of all, I acknowledge the support of my wife Cindy Callens and my family: my parents Dirk Van Caekenberghe and Rosette De Knop and my brothers Frank, Steven and Stijn. I am especially grateful to Cindy, who endured a lot of hardship during the Ph.D program, first as my girlfriend and later as my wife. I also thank my grandparents: the late Jozef De Knop and the late Paula Olbrechts, who partly raised me during my childhood, and the late Alo¨ıs Van Caekenberghe and Julia Wuyts who were my first math teachers.

[1]  Gabriel M. Rebeiz,et al.  A 20-50 GHz RF MEMS single-stub impedance tuner , 2005, IEEE Microwave and Wireless Components Letters.

[2]  K. Gupta,et al.  Microstrip Lines and Slotlines , 1979 .

[3]  J.L. Volakis,et al.  Fully integrated electrothermal multidomain modeling of RF MEMS switches , 2003, IEEE Microwave and Wireless Components Letters.

[4]  F. E. Gardiol,et al.  Near-field diagnostics of small printed antennas using the equivalent magnetic current approach , 2001 .

[5]  Gabriel M. Rebeiz,et al.  Optimization of distributed MEMS transmission-line phase shifters-U-band and W-band designs , 2000 .

[6]  S. Eshelman,et al.  Performance of low-loss RF MEMS capacitive switches , 1998 .

[7]  J.D.S. Langley,et al.  Novel ultrawide-bandwidth Vivaldi antenna with low crosspolarisation , 1993 .

[8]  Gabriel M. Rebeiz,et al.  A 90-100 GHz double-folded slot antenna , 1999 .

[9]  R. Loo,et al.  Photonic wideband array antennas , 1995 .

[10]  M. Tentzeris,et al.  RF MEMS Sequentially Reconfigurable Sierpinski Antenna on a Flexible Organic Substrate With Novel DC-Biasing Technique , 2007, Journal of Microelectromechanical Systems.

[11]  S.R. Best.  A discussion on the quality factor of impedance matched electrically small wire antennas , 2005, IEEE Transactions on Antennas and Propagation.

[12]  George W. Stimson,et al.  Introduction to Airborne Radar , 1983 .

[14]  K.M.K.H. Leong,et al.  Composite Right/Left-Handed Metamaterial Antennas , 2006, IEEE International Workshop on Antenna Technology Small Antennas and Novel Metamaterials, 2006..

[15]  A. D. Olver.  Compact antenna test ranges , 1991 .

[16]  David Potter,et al.  Microswitches and microrelays with a view toward microwave applications , 1999 .

[17]  A.D. Yaghjian,et al.  Impedance, bandwidth, and Q of antennas , 2003, IEEE Transactions on Antennas and Propagation.

[18]  Peter Hall,et al.  Balanced antipodal Vivaldi antenna for wide bandwidth phased arrays , 1996 .

[19]  Alexander Yarovoy.  Ultra-Wideband Systems , 2003, 2003 33rd European Microwave Conference, 2003.

[20]  L.M. Feldner,et al.  Electrically Small Frequency-Agile PIFA-as-a-Package for Portable Wireless Devices , 2007, IEEE Transactions on Antennas and Propagation.

[21]  Anh-Vu Pham,et al.  Multilayer Organic Multichip Module Implementing Hybrid Microelectromechanical Systems , 2008, IEEE Transactions on Microwave Theory and Techniques.

[22]  B. Pillans,et al.  RF power handling of capacitive RF MEMS devices , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[23]  M. Skolnik,et al.  Introduction to Radar Systems , 2021, Advances in Adaptive Radar Detection and Range Estimation.

[24]  D. Parker,et al.  Phased arrays - part 1: theory and architectures , 2002 .

[25]  Albrecht Ludloff,et al.  Praxiswissen Radar und Radarsignalverarbeitung , 1998 .

[26]  Antonio Faraone,et al.  Multiband internal antenna for mobile phones , 2005 .

[27]  Gabriel M. Rebeiz,et al.  Miniature RF MEMS switched capacitors , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[28]  Gabriel M. Rebeiz,et al.  A 94 GHz aperture-coupled micromachined microstrip antenna , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).

[29]  P. Vainikainen,et al.  Resonator-based analysis of the combination of mobile handset antenna and chassis , 2002 .

[30]  G. Agrawal.  Fiber‐Optic Communication Systems , 2021 .

[31]  J. Bustillo,et al.  Surface micromachining for microelectromechanical systems , 1998, Proc. IEEE.

[32]  G. Gray.  Radar imaging with ALG - the on-board low visibility landing aid , 2002 .

[33]  R. Bansal,et al.  Antenna theory; analysis and design , 1984, Proceedings of the IEEE.

[34]  Arthur D. Yaghjw.  An Overview of Near-Field Antenna Measurements , 2009 .

[35]  Eli Brookner.  Practical Phased Array Antenna Systems , 1991 .

[36]  Daniel C. Edelstein,et al.  Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates , 1997 .

[37]  J. Hirokawa,et al.  Analysis of a Rectangular Waveguide, Edge Slot Array With Finite Wall Thickness , 2007, IEEE Transactions on Antennas and Propagation.

[38]  L.P.B. Katehi,et al.  Fabrication and accelerated hermeticity testing of an on-wafer package for RF MEMS , 2004, IEEE Transactions on Microwave Theory and Techniques.

[39]  John P. Sullivan,et al.  Performance of amorphous diamond RF MEMS capacitive switch , 2004 .

[40]  A. C. Newell,et al.  Error analysis techniques for planar near-field measurements , 1988 .

[41]  Robert A. York,et al.  Distributed analog phase shifters with low insertion loss , 1999 .

[42]  S. Weinreb,et al.  Electronically steered, receive monopulse, active phased array at 94 GHz , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[43]  R. Mihailovich,et al.  A Ka-band 3-bit RF MEMS true-time-delay network , 2003 .

[44]  Gabriel M. Rebeiz,et al.  Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches , 2003 .

[45]  J. Maciel,et al.  Demonstrating Reliability , 2007, IEEE Microwave Magazine.

[46]  B. Lakshminarayanan,et al.  Optimization and Implementation of Impedance-Matched True-Time-Delay Phase Shifters on Quartz Substrate , 2007, IEEE Transactions on Microwave Theory and Techniques.

[47]  H.A.C. Tilmans,et al.  Design considerations and technology assessment of phased-array antenna systems with RF MEMS for automotive radar applications , 2005, IEEE Transactions on Microwave Theory and Techniques.

[48]  P. Blondy,et al.  Sub-Microsecond RF MEMS Switched Capacitors , 2007, IEEE Transactions on Microwave Theory and Techniques.

[49]  S..  A Re-Examination of the Fundamental Limits on the Radiation Q of Electrically Small Antennas , 2008 .

[50]  C. Nguyen.  MEMS technology for timing and frequency control , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[51]  Hugh Griffiths,et al.  Air and Spaceborne Radar Systems: an Introduction , 2001 .

[52]  K. Sarabandi,et al.  Ka-band MEMS TTD passive electronically scanned array (ESA) , 2006, 2006 IEEE Antennas and Propagation Society International Symposium.

[53]  R. C. Baird,et al.  A brief history of near-field measurements of antennas at the National Bureau of Standards , 1988 .

[54]  J. R. Jensen.  Angle measurement with a phase monopulse radar altimeter , 1999 .

[55]  Arthur A. Oliner,et al.  Phased array antennas , 1972 .

[56]  Paul D. Agnello,et al.  Process requirements for continued scaling of CMOS-the need and prospects for atomic-level manipulation , 2002, IBM J. Res. Dev..

[57]  Brad Binder,et al.  Transmit Receive Modules , 2005, Active Electronically Scanned Arrays.

[58]  Zhi Ning Chen,et al.  Ultra Wideband Wireless Communication , 2005 .

[59]  A. Shamim,et al.  24 GHz On-Chip Antennas and Balun on Bulk Si for Air Transmission , 2008, IEEE Transactions on Antennas and Propagation.

[60]  J. Turtle,et al.  MEMS Electronically Steerable Antennas for Fire Control Radars , 2007, 2007 IEEE Radar Conference.

[61]  F. D. Flaviis,et al.  Reconfigurable scan-beam single-arm spiral antenna integrated with RF-MEMS switches , 2006, IEEE Transactions on Antennas and Propagation.

[62]  L. Katehi,et al.  Measured and simulated electric, magnetic, and thermal field distributions of a patch antenna operating at high power , 2002, IEEE Antennas and Propagation Society International Symposium (IEEE Cat. No.02CH37313).

[63]  Greg Hindman,et al.  Simplified Spherical Near-Field Accuracy Assessment , 2007, IEEE Antennas and Propagation Magazine.

[64]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[65]  L.P.B. Katehi,et al.  Microelectromechanical systems (MEMS) actuators for antenna reconfigurability , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[66]  Gabriel M. Rebeiz,et al.  RF MEMS Impedance Tuners for 6-24 GHz Applications , 2007 .

[67]  Gabriel M. Rebeiz,et al.  A miniature 2.1-GHz low loss microstrip filter with independent electric and magnetic coupling , 2004, IEEE Microwave and Wireless Components Letters.

[68]  Gabriel M. Rebeiz,et al.  Optimization of distributed MEMS phase shifters , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[69]  A. Datta,et al.  Are Diamonds a MEMS' Best Friend? , 2007, IEEE Microwave Magazine.

[70]  G.M. Rebeiz,et al.  Low-Loss 5.15–5.70-GHz RF MEMS Switchable Filter for Wireless LAN Applications , 2006, IEEE Transactions on Microwave Theory and Techniques.

[71]  S. Senturia.  Microsystem Design , 2000 .

[72]  D. Parker,et al.  Phased arrays-part II: implementations, applications, and future trends , 2002 .

[73]  J.T. Bernhard,et al.  Integration of packaged RF MEMS switches with radiation pattern reconfigurable square spiral microstrip antennas , 2006, IEEE Transactions on Antennas and Propagation.

[74]  P. Zavracky,et al.  Micromechanical switches fabricated using nickel surface micromachining , 1997 .

[75]  T. Zwick,et al.  Probe based MMW antenna measurement setup , 2004, IEEE Antennas and Propagation Society Symposium, 2004..

[76]  K. J. Herrick,et al.  S-Ku band intelligent amplifier microsystem , 2006, SPIE Defense + Commercial Sensing.

[77]  P. J. Gibson.  The Vivaldi Aerial , 1979, 1979 9th European Microwave Conference.

[78]  R.N. Simons,et al.  On-wafer characterization of millimeter-wave antennas for wireless applications , 1998 .

[79]  John L. Volakis,et al.  Antenna Engineering Handbook , 2007 .

[80]  T.M. Weller,et al.  Design and modeling of 4-bit slow-wave MEMS phase shifters , 2006, IEEE Transactions on Microwave Theory and Techniques.

[81]  Jon Rigelsford,et al.  Introduction to Airborne Radar, 2nd ed. , 2002 .

[82]  Kamal Sarabandi,et al.  A novel approach for miniaturization of slot antennas , 2003 .

[83]  A. Sugavanam,et al.  On-chip antennas in silicon ICs and their application , 2005, IEEE Transactions on Electron Devices.

[84]  A.K. Skrivervik,et al.  Modeling of periodic distributed MEMS-application to the design of variable true-time delay lines , 2006, IEEE Transactions on Microwave Theory and Techniques.

[85]  Robert J. Mailloux,et al.  Phased Array Antenna Handbook , 1993 .

[86]  T.C. Holloway,et al.  Development of the Self-Aligned Titanium Silicide Process for VLSI Applications , 1985, IEEE Journal of Solid-State Circuits.

[87]  Dean P. Neikirk,et al.  Far-infrared microbolometer detectors , 1984 .

[88]  L.E. Larson,et al.  A Low-Cost and Low-Power CMOS Receiver Front-End for MB-OFDM Ultra-Wideband Systems , 2007, IEEE Journal of Solid-State Circuits.

[89]  R. Keith Raney,et al.  The delay/Doppler radar altimeter , 1998, IEEE Trans. Geosci. Remote. Sens..

[90]  Christos G. Christodoulou,et al.  RF-MEMS and its applications to microwave systems, antennas and wireless communications , 2003, Proceedings of the 2003 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference - IMOC 2003. (Cat. No.03TH8678).

[91]  J. C. Sarace,et al.  Metal-nitride-oxide-silicon field-effect transistors, with self-aligned gates☆ , 1968 .

[92]  S. Sivoththaman,et al.  A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process , 2006, IEEE Electron Device Letters.

[93]  R. Collin.  Antennas and Radiowave Propagation , 1985 .

[94]  C.D. Nordquist,et al.  A DC to 10-GHz 6-b RF MEMS time delay circuit , 2006, IEEE Microwave and Wireless Components Letters.

[95]  R. Hansen,et al.  Fundamental limitations in antennas , 1981, Proceedings of the IEEE.

[96]  K. R. Williams,et al.  Etch rates for micromachining processing , 1996 .

[97]  Rainee N. Simons,et al.  Novel On-wafer Radiation Pattern Measurement Technique for MEMS Actuator Based Reconfigurable Patch Antennas , 2002 .

[98]  C. Kapusta,et al.  Design and Development of a Package Using LCP for RF/Microwave MEMS Switches , 2006, IEEE Transactions on Microwave Theory and Techniques.

[99]  K. R. Williams,et al.  Etch rates for micromachining processing-Part II , 2003 .

[100]  J. Mandel,et al.  Reproducibility of electromigration measurements , 1987, IEEE Transactions on Electron Devices.

[101]  Firooz A. Sadjadi,et al.  Radar synthetic vision system for adverse weather aircraft landing , 1999 .

[102]  Walter D. Burnside,et al.  Curved edge modification of compact range reflector , 1985 .

[103]  G. Ponchak,et al.  Reconfigurable RF MEMS Phased Array Antenna Integrated Within a Liquid Crystal Polymer (LCP) System-on-Package , 2008, IEEE Transactions on Antennas and Propagation.

[104]  A. Sugavanam,et al.  Integrated antennas on silicon substrates for communication over free space , 2004, IEEE Electron Device Letters.

[105]  I.D. Robertson,et al.  Single-Pole Eight-Throw RF MEMS Rotary Switch , 2006, Journal of Microelectromechanical Systems.