论文信息 - Optical properties of CrO/ZrO optical superlattice for attenuated phase shifting mask at 193 nm wavelength - 字舞流文

Optical properties of CrO/ZrO optical superlattice for attenuated phase shifting mask at 193 nm wavelength

Lon A. Wang | F. Lai

[1] Bruce W. Smith,et al. Development and characterization of nitride and oxide based composite materials for sub 0.18 mm attenuated phase shift masking , 1997 .

[2] H. Fukuda,et al. Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks , 1991 .

[3] O. Hunderi. The optical properties of thin films and superlattices , 1989 .