论文信息 - Oxygen to silicon ratio determination of SiOxHy thin films - 字舞流文

Oxygen to silicon ratio determination of SiOxHy thin films

I. Mártil | G. González-Díaz | W. Bohne | E. Andrés | I. Sieber | J. Röhrich | B. Selle | M. Fernández | Á. Prado