论文信息 - Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target - 字舞流文

Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target

F. Caballero-Briones | R. Castro-Rodríguez | M. Zapata-Torres | A. Zapata-Navarro | P. Bartolo-Pérez | A. Martel | J. Fandiño | J. Peña