Sliding‐mode control of a three‐degrees‐of‐freedom nanopositioner

This paper presents the sliding-mode control of a three-degrees-of-freedom nanopositioner (Z, θx, θy). This nanopositioner is actuated by piezoelectric actuators. Capacitive gap sensors are used for position feedback. In order to design the feedback controller, the open-loop characteristics of this nanopositioner are investigated. Based on the results of the investigation, each pair of piezoelectric actuators and corresponding gap sensors is treated as an independent system and modeled as a first-order linear model coupled with hysteresis. When the model is identified and the hysteresis nonlinearity is linearized, a linear system model with uncertainty is used to design the controller. When designing the controller, the sliding-mode disturbance (uncertainty) estimation and compensation scheme is used. The structure of the proposed controller is similar to that of a proportional integral derivative controller. Thus, it can be easily implemented. Experimental results show that 3-nm tracking resolution can be obtained. Copyright © 2008 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society

[1]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[2]  Musa Jouaneh,et al.  Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators , 1997 .

[3]  Chih-Lyang Hwang,et al.  A reinforcement discrete neuro-adaptive control for unknown piezoelectric actuator systems with dominant hysteresis , 2003, IEEE Trans. Neural Networks.

[4]  Jing-Chung Shen,et al.  H∞ Control and Sliding Mode Control of Magnetic Levitation System , 2008 .

[5]  Gang Tao,et al.  Adaptive control of plants with unknown hystereses , 1995 .

[6]  Sabri Cetinkunt,et al.  Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner , 2000 .

[7]  P. Gao,et al.  A six-degree-of-freedom micro-manipulator based on piezoelectric translators , 1999 .

[8]  Yi-Cheng Huang,et al.  ULTRA‐FINE TRACKING CONTROL ON PIEZOELECTRIC ACTUATED MOTION STAGE USING PIEZOELECTRIC HYSTERETIC MODEL , 2008 .

[9]  Shuo-Hung Chang,et al.  An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance , 1999 .

[10]  Jing-Chung Shen,et al.  New tuning method for PID controller. , 2002 .

[11]  Ye-Hwa Chen,et al.  Piezomechanics using intelligent variable-structure control , 2001, IEEE Trans. Ind. Electron..

[12]  Vadim I. Utkin,et al.  Sliding mode control in electromechanical systems , 1999 .

[13]  Richard M. Seugling,et al.  A six-degree-of-freedom precision motion stage , 2002 .

[14]  Vincent Hayward,et al.  Phase control approach to hysteresis reduction , 2001, IEEE Trans. Control. Syst. Technol..

[15]  J.-H. Xu.  Neural network control of a piezo tool positioner , 1993, Proceedings of Canadian Conference on Electrical and Computer Engineering.

[16]  Ping Ge,et al.  Tracking control of a piezoceramic actuator , 1996, IEEE Trans. Control. Syst. Technol..