论文信息 - Sputter deposition of YSZ epitaxial buffer layer at wafer level for piezoelectric MEMS utilizing PZT-based monocrystalline thin film - 字舞流文

Sputter deposition of YSZ epitaxial buffer layer at wafer level for piezoelectric MEMS utilizing PZT-based monocrystalline thin film

Shuji Tanaka | Shinya Yoshida | Kiyotaka Wasa | Shinsuke Nishizawa | Shinsuke Nishizawa

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