论文信息 - Ion beam nitridation of a Si(111) surface: effects of ion reactivity and thermal treatment - 字舞流文

Ion beam nitridation of a Si(111) surface: effects of ion reactivity and thermal treatment

Heon Kang | B. C. Kim | Jinwook W. Chung | C. Kim | Jinwook Chung | C. Kim | C. Kim