Transmission-type position sensor for the straightness measurement of a large structure

A new position sensor has been fabricated which is suitable for detecting the accurate straightness reference of a laser beam. This is achieved by fabricating a four-cell type photodiode inside a Si micro-mesh structure. This sensor does not disturb the direction or the wave front of the reference laser beam as it absorbs only some of the incident photons and transmits the rest down stream. The straightness of ~1 m structures can be measured with ~1 µm accuracy at many points by placing the sensors in series.

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