Fully packaged CMOS current monitor using lead-on-chip technology

A compact CMOS monitor system for galvanically isolated current measurement is presented. It is packaged with standard lead-on-chip technology and completely in line with commercial IC production. This technology includes inexpensive and high volume batch fabrication of chips followed by automatic mass packaging. The system has a linear response in a range of /spl plusmn/10 A with a small non-linearity below /spl plusmn/0.3%. This results in a measurement accuracy of better than 50 mA. The accuracy is further improved by soft ferromagnetic field concentrators.

[1]  Mark G. Allen,et al.  Electroplated soft magnetic materials for microsensors and microactuators , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[2]  S. Middelhoek,et al.  Autocalibration Of Silicon Hall Devices , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[3]  S. D. Collins,et al.  Study of electrochemical etch-stop for high-precision thickness control of silicon membranes , 1989 .

[4]  Henry Baltes,et al.  Offset reduction in Hall devices by continuous spinning current method , 1998 .

[5]  Franco Maloberti,et al.  A magnetic sensor with current-controlled sensitivity and resolution , 1995 .

[6]  R. Gottfried-Gottfried Thermal behaviour of CMOS Hall sensors for different operating modes , 1994 .

[7]  Janez Trontelj,et al.  CMOS integrated magnetic field source used as a reference in magnetic field sensors on common substrate , 1994, Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9).