A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining
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H. Fujita | H. Seita | H. Toshiyoshi | S. Kawasaki | D. Yamane | H. Fujita | H. Toshiyoshi | S. Kawasaki | W. Sun | D. Yamane | H. Seita | W. Sun
[1] J. Bouchaud,et al. RF MEMS roadmap , 2007, 2007 European Microwave Conference.
[2] C. Nguyen,et al. Design of low actuation voltage RF MEMS switch , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).
[3] Hiroyuki Fujita,et al. A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design , 2010, IEICE Electron. Express.
[4] E. Yeatman,et al. Laterally Actuated, Low Voltage, 3-Port RF MEMS Switch , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[5] Chang Han Je,et al. A low-loss single-pole six-throw switch based on compact RF MEMS switches , 2005, IMS 2005.
[6] S. Kawasaki,et al. Japan’s project for the research and development of active phased array antennas for practical applications , 2007, 2007 19th International Conference on Applied Electromagnetics and Communications.
[7] Yong-Kweon Kim,et al. A single-pole nine-throw antenna switch using radio-frequency microelectromechanical systems technology for broadband multi-mode and multi-band front-ends , 2007 .
[8] Koichi Imanaka,et al. Development of a large-force low-loss metal-contact RF MEMS switch , 2006 .
[9] D. McCormick,et al. A low-voltage lateral MEMS switch with high RF performance , 2004, Journal of Microelectromechanical Systems.
[10] H. Fujita,et al. A 12-GHz DPDT RF-MEMS Switch with Layer-Wise Waveguide/Actuator Design Technique , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
[11] T. Seki,et al. Development of SPDT-structured RF MEMS switch , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
[12] Gabriel M. Rebeiz,et al. RF MEMS switches and switch circuits , 2001 .
[13] H. Fujita,et al. Topological layer switch technique for monolithically integrated electrostatic XYZ-stage , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
[14] S. Eshelman,et al. Performance of low-loss RF MEMS capacitive switches , 1998 .
[15] Gabriel M. Rebeiz. RF MEMS: Theory, Design and Technology , 2003 .
[16] Hiroyuki Fujita,et al. Development of a Dual-SPDT RF-MEMS switch for Ku-band , 2010, 2010 IEEE Radio and Wireless Symposium (RWS).
[17] Ai Qun Liu,et al. Mechanically tri-stable, true single-pole-double-throw (SPDT) switches , 2006 .
[18] Hiroyuki Fujita,et al. An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism , 2010, IEICE Electron. Express.
[19] D. P. Neikirk,et al. Compact equivalent circuit model for the skin effect , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.
[20] J.S. McKillop,et al. Design of a 20 GHz Low Loss Ohmic Contact RF MEMS Switch , 2007, 2007 IEEE/MTT-S International Microwave Symposium.
[21] Guan-Leng Tan,et al. RF MEMS phase shifters: design and applications , 2002 .
[22] Ai Qun Liu,et al. A silicon-on-glass single-pole-double-throw (SPDT) switching circuit integrated with a silicon-core metal-coated transmission line , 2008 .