论文信息 - Research of scratch visibility in (subsurface) damage detection based on total internal reflection microscopy

Research of scratch visibility in (subsurface) damage detection based on total internal reflection microscopy

Damages on or near polished substates can be easily observed by TIRM(Total Internal Reflection Microscopy). In our experiments we found that there was a strong dependence of scratch visibility on the angle(φ) between scratches and normal direction of the incident plane. In this paper, the scattered field distribution of a scratch and the imaging properties of a microscope are analyzed. We believe that it is the anisotropy of illumination in TIR-illumination mode that causes the visibility changes of a scratch. After taking this directionality into consideration, we propose an experimental method for TIRM to take picutures with all scratches in all directions in one image.

Shijie Liu | Jie Liu | Jun He | Yuanan Zhao | Hui Cui

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