A surface and bulk micromachined angular vertical combdrive for scanning micromirrors

We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of /spl plusmn/4/spl deg/ (mechanical) is achieved at 40 V.

[1]  Larry J. Hornbeck,et al.  Deformable-Mirror Spatial Light Modulators , 1990, Optics & Photonics.

[2]  Huikai Xie,et al.  A SCS CMOS micromirror for optical coherence tomographic imaging , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[3]  M.C. Wu,et al.  Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors , 2001, IEEE Photonics Technology Letters.

[4]  C. King,et al.  Digital MEMS switch for planar photonic crossconnects , 2002, Optical Fiber Communication Conference and Exhibit.

[5]  Hongrui Jiang,et al.  Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator , 1999 .

[6]  David J. Bishop,et al.  MEMS/MOEMS for lightwave networks: Can little machines make it big? , 2000, SPIE MOEMS-MEMS.