High refractive index and high transparency HfO2 nanocomposites for next generation lithography
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Markos Trikeriotis | Woo Jin Bae | Evan L. Schwartz | Paul Zimmerman | Robert Rodriguez | Emmanuel P. Giannelis | Christopher K. Ober | P. Zimmerman | C. Ober | E. Giannelis | Jing Sha | Jingquan Sha | Robert Rodriguez | M. Trikeriotis | W. Bae | E. Schwartz
[1] H. Elwing,et al. Self-arrangement among charge-stabilized gold nanoparticles on a dithiothreitol reactivated octanedithiol monolayer. , 2008, Nano letters.
[2] L. Bremer,et al. High refractive index nanocomposite fluids for immersion lithography. , 2009, Langmuir : the ACS journal of surfaces and colloids.
[3] P. Gómez‐Romero. Hybrid Organic–Inorganic Materials—In Search of Synergic Activity , 2001 .
[4] Janusz Zachara,et al. The O , O ′-diacetyl ( R , R )-hydrogentartrate ester of ( S )-pantolactoneTartaric acid and its O -acyl derivatives. Part 3. , 2007 .
[5] Will Conley,et al. Polycycloalkanes as Potential third-generation immersion fluids for photolithography at 193 nm , 2007 .
[6] Christopher K. Ober,et al. Nanocomposite Materials for Optical Applications , 1997 .
[7] E. Bourhis,et al. Mechanical properties of hybrid organicinorganic materials , 2005 .
[8] Paul Zimmerman,et al. The use of nanocomposite materials for high refractive index immersion lithography , 2008 .
[9] Howard Katz,et al. Inorganic oxide core, polymer shell nanocomposite as a high K gate dielectric for flexible electronics applications. , 2005, Journal of the American Chemical Society.
[10] R. Jin,et al. One-pot synthesis of robust core/shell gold nanoparticles. , 2008, Journal of the American Chemical Society.
[11] K. Okuyama,et al. Correlations between Crystallite/Particle Size and Photoluminescence Properties of Submicrometer Phosphors , 2007 .
[12] Hong Ma,et al. Study on the formation of self-assembled monolayers on sol-gel processed hafnium oxide as dielectric layers. , 2009, Langmuir : the ACS journal of surfaces and colloids.
[13] K. Müllen,et al. A Simple and Efficient Route to Transparent Nanocomposites , 2008 .
[14] T. Bloomstein,et al. Nanopatterning with UV Optical Lithography , 2005 .
[15] G. Sukhorukov,et al. Nanoparticle Synthesis in Engineered Organic Nanoscale Reactors , 2004 .
[16] V. Ho,et al. Resistive switching effects of HfO2 high-k dielectric , 2008 .
[17] C. Grant Willson,et al. High Index Resist for 193 nm Immersion Lithography , 2008 .