In the MEMS scale the presence of joints and pins must be avoided due to manufacturing constraints. This makes difficult to design micromechanisms with many degrees of freedom to perform complex movements, such as micromanipulators or micro-robots. However, these microdevices can have a wide range of application such as cell manipulation, microsurgery, nanotechnology equipment,etc. Therefore, in this work, a method for designing multiflexible micromanipulators is proposed by using topology optimization technique based on the homogenization design method. Micromanipulators considered in this work consist of a multiflexible structure actuated by two or more piezoceramics. A multi-flexible structure must generate different output displacements and forces in different specified points of the domain and directions, for different excited piezoceramics. It acts as a mechanical transform by amplifying and changing the direction of the piezoceramics output displacements. The multiflexible structure design is obtained by distributing flexibility and stiffness in the design domain, which can be achieved through topology optimization. Essentially, the topology optimization method consists of finding the optimal material distribution in a perforated design domain with infinite microscale voids. The material in each point can vary from void to full material, also assuming intermediate materials. The optimization problem is posed as the design of a flexible structure that maximizes different output displacements (or grabbing forces) in different specified directions and points of the domain, for different excited piezoceramics. Different types of micromanipulators can be obtained for a desired application depending on the multiflexible structure design connected to the piezoceramics. A linear behavior of piezoceramics is considered. To illustrate the method, the design of some micromanipulators are presented.
[1]
Ole Sigmund,et al.
On the Design of Compliant Mechanisms Using Topology Optimization
,
1997
.
[2]
Dominiek Reynaerts,et al.
A mechatronic approach to microsystem design
,
1996
.
[3]
R. Haftka,et al.
Elements of Structural Optimization
,
1984
.
[4]
R. J. Hanson,et al.
Sparse linear programming subprogram
,
1981
.
[5]
Stuart T. Smith,et al.
Foundations of ultraprecision mechanism design
,
1992
.
[6]
N. Kikuchi,et al.
A homogenization method for shape and topology optimization
,
1991
.
[7]
Noboru Kikuchi,et al.
Design optimization method for compliant mechanisms and material microstructure
,
1998
.
[8]
N. Kikuchi,et al.
Topology optimization design of flextensional actuators
,
2000,
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[9]
Martin P. Bendsøe,et al.
Optimization of Structural Topology, Shape, And Material
,
1995
.
[10]
Fumihito Arai,et al.
Micro mechatronics and micro actuators
,
1996
.
[11]
N. Kikuchi,et al.
Optimal structural design considering flexibility
,
2001
.
[12]
Emilio Carlos Nelli Silva,et al.
Design of piezoelectric motors using topology optimization
,
2001
.
[13]
S H Chang,et al.
An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis.
,
1999,
IEEE transactions on ultrasonics, ferroelectrics, and frequency control.
[14]
Sabri Cetinkunt,et al.
Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner
,
2000
.
[15]
N. Kikuchi,et al.
Preprocessing and postprocessing for materials based on the homogenization method with adaptive fini
,
1990
.