论文信息 - Replication of optical rib waveguide structures using nickel shims

Replication of optical rib waveguide structures using nickel shims

The use of conventional fabrication techniques for the fabrication of polymer based photonic integrated waveguide circuits is a necessary step to reduce costs. The replication of rib waveguides is presented using nickel shims. Results of replicated waveguides and 1 x 2 multimode interference (MMI) couplers are shown.

Dominik G. Rabus | Patric Henzi | Mathias Bründel

[1] Werner Karl Schomburg,et al. Large-scale hot embossing , 2005 .

[2] Jürgen Mohr,et al. Photonic integrated circuits by DUV-induced modification of polymers , 2005 .

[3] Hans Kragl,et al. LOW COST MONOMODE, INTEGRATED OPTICS POLYMERIC COMPONENTS WITH PASSIVE FIBRE-CHIP COUPLING , 1997 .

[4] A. Yariv,et al. Soft lithography replica molding of critically coupled polymer microring resonators , 2004, IEEE Photonics Technology Letters.

[5] E.C.M. Pennings,et al. Optical multi-mode interference devices based on self-imaging: principles and applications , 1995 .

[6] Norbert Keil,et al. Athermal all-polymer arrayed-waveguide grating multiplexer , 2001 .

[7] Wolfgang Ehrfeld,et al. Polymer waveguide devices with passive pigtailing : an application of LIGA technology , 2000 .

[8] M. Heckele,et al. Review on micro molding of thermoplastic polymers , 2004 .

[9] Juergen Mohr,et al. Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure , 2004, SPIE Photonics Europe.