X-ray stepper development for volume production at Canon

We describe some results of exposure experiments using the present prototype SR stepper which Canon has developed and the novel technology development which is necessary to establish the next generation SR stepper for volume production. Concerning the technology development, we have established (1) two mirror condensing system for full field exposure, (2) ADGL alignment method, (3) magnification correction method, (4) high speed stage stepping method. By adopting these technologies, we have been developing a beta- site machine for volume production and its features and preliminary specifications are described.